The new "Soft X-ray Multimodal Operando Micro-Spectroscopy Equipment" to be introduced by the National Institute
for Materials Science (NIMS) will allow for the analysis of the electronic and chemical states of solids. By using a
focusing mirror, light focused down to 1 μm or less on the sample can be utilized, and by using a Fresnel zone plate,
light focused down to Φ100 nm or less on the sample can be utilized. The use of focused light enables the analysis of
not only homogeneous, fine, polycrystalline and combinatorial samples. XPS, UPS, XAS are planned as standard
measurements, and ARPES, SARPES, nano-focused measurement, and operando measurement are planned as
advanced measurements. Both steady-state measurements and measurements under operating environments are
possible for materials such as semiconductor materials, spintronic materials, battery materials, and thermoelectric
materials.
(Note) The values above are design values and may differ from the actual values.
XPS, UPS, XAS, ARPES, SARPES
*Maximum 5 mm × 5 mm (thickness: several mm)
*Solid material (conductive, with the observation target located within 2 nm of the surface)
*Does not adversely affect the ultra-high vacuum environment
Operations were initially planned to begin in May 2025, but it has become clear that more time is required for
alignments. Therefore, we now plan to commence operations gradually starting in October. The measurement that will
be available from October is planned to be XPS using a non-focused beam.
We will inform you of the more detailed schedule for the start of operations as soon as it is finalized.